Simulation and modeling for future lithography processes (Taylor - UCBerkeley)


“Computationally inexpensive simulation and modeling for future lithography processes”

Prof. Hayden Taylor
Department of Mechanical Engineering
University of California, Berkeley

Nanoimprint lithography (NIL) — in which a thermoplastic film or ultraviolet-curing resin is mechanically nanopatterned in contact with a solid template — offers sub-10 nm patterning resolution with lower capital costs than competing technologies such as extreme ultraviolet lithography (EUV). To be adopted widely in data storage and semiconductor manufacturing, NIL’s throughput needs to increase and its defect rate needs to fall. One way of improving NIL’s throughput and yield is to develop comprehensive models of the process that can guide its optimization.

Over the last six years we have developed a computationally inexpensive simulation technique for NIL. The technique captures the deformation behavior of an imprinted polymeric film or droplet pattern using its mechanical impulse response, and describes elastic deformations of the patterned imprinting mask/template via a point-load response. We have developed the technique to simulate the imprinting of chip-scale patterns containing many millions of features, and to model the imprinting of both thermoplastic resists and ultraviolet-curing resins. I will describe the simulation technique and how we have applied it to: (i) optimize process parameters, (ii) select materials for the template, and (iii) guide the
design of the imprinted pattern itself.

We have also applied the model to the manufacturing of polymeric microfluidic devices, and have extended the model for roller-based imprinting on continuous substrates, capturing substrate-speed and roller-load dependencies. By considering viscoelasticity of the imprinted material, we argue that there is an optimal substrate speed that maximizes the fidelity of imprinted patterns. Finally, we introduce recent work to model efficiently the directional spreading and coalescence of tens of thousands of picoliter-volume droplets of resist beneath a patterned imprint template.

Speaker Background

Hayden Taylor is an Assistant Professor in the Department of Mechanical Engineering, UC Berkeley. He received the B.A. and M.Eng. degrees in Electrical and Electronic Engineering from Cambridge University in 2004, and the Ph.D. in Electrical Engineering and Computer Science from MIT in 2009. Hayden is a member of the IEEE, the Institution of Engineering and Technology, and the Institute of Physics.


Monday, August 24


Michael's Restaurant at Shoreline Park
2960 N. Shoreline Park
Mountain View, CA 94043



6 PM social hour
7 PM dinner
8 PM lecture


Employed/postdoc Student/unemployed/retired
Early Registration  $30 $15
Registration $35 $20
Walk-in (not guaranteed) $40 $25

Lecture-only is free.



We accept cash or checks at the door, or online payment via credit card. No-shows are responsible for full payment of registration fee.


Please register below or contact:

Eveleen Tang
phone: 650-965-3831 x228

Deadline for registration:

11:59PM, Monday, August 17 for early registration discount.
5PM, Friday, August 21 for regular registration.

Dinner Selection:

Seafood - Broiled salmon with lemon beurre blanc
Chicken - Chicken with portobello mushrooms
Vegetarian - Vegetable napoleon with grilled polenta

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