The Carbon Dioxide Technology Platform and the Microelectronics Industry, Prof. Joseph M. DeSimone


Monthly Dinner Meeting
Tuesday, Feb. 27, 2001

" The Carbon Dioxide Technology Platform
and the Microelectronics Industry"

Joseph M. DeSimone
William R. Kenan Jr. Distinguished Professor
of Chemistry and Chemical Engineering, &
Director, NSF Science & Technology Center for
Environmentally Responsible Solvents and Processes

Dept. of Chemistry
Univ. of North Carolina at Chapel Hill
Dept. of Chemical Engineering
North Carolina State Univ.


The microelectronics industry is facing a number of
daunting challenges: "image collapse" due to the
inherently high surface tension of water-based development
procedures used in lithography; forming uniform thin films
on large-area substrates, including 300-500 mm wafers and
flat panel displays, because of the inherently high
viscosity of organic solvents; dissolving fluorinated
polymers used as lubricants for hard disk drives and as
resists for 157 nm lithography; ion contamination associated
with water usage; the incompatibility of wafer and organic
solvents with "cluster tool" concepts; and the environmental
and health issues associated with wet processes. This
lecture will report on the latest results from the NSF
Science & Technology Center which eliminate the above
challenges by using integrated processes -- designed
chemistry with novel equipment and processes -- based on
liquid and supercritical carbon dioxide.

Speaker biographical background:

DeSimone received his B.S. in Chemistry from Ursinus College,
PA and his Ph.D. in 1990 from the Department of Chemistry at
Virginia Polytechnic Institute and State University where he
worked with Professor James E. McGrath. He currently holds
the only endowed professorship to span both NC State and UNC
at Chapel Hill. DeSimone's chair, the William R. Kenan Jr.
Distinguished Professorship of Chemistry and Chemical Engineering,
was newly established to recognize the impact that he has had
on the fundamental and the applied chemical sciences at both of
these institutions. He has over 100 refereed publications and
45 issued US patents.

His work proving that CO2 could be used as a solvent for the
synthesis of polymers (Science 1994, vol. 265, p. 356), and his
synthesis of technologically important fluoropolymers (Science
1992, vol. 257, p. 245) launched an almost decade-long research
partnership with DuPont; this research has now culminated in
Dupont's announcement that they will build a Teflon(TM)
manufacturing plant that will utilize a CO2-based polymerization

DeSimone and his students established the design criteria
necessary for effective surfactants or detergents for CO2
(Science 1996, vol. 274, p. 2049). Using molecularly-
engineered block and graft copolymers and small angle X-ray
and neutron scattering, they found the first conclusive
evidence for the formation of micelles in CO2. The design of
surfactants for CO2 allows for the broad based utilization of
environmentally friendly CO2 in many applications including
separations, catalysis, and thin film deposition technologies.
From an offshoot of this surfactant research DeSimone started
a company called Micell Technologies to commercialize the use
of liquid CO2 in dry cleaning to replace the hazardous solvents
used in over 100,000 dry cleaning plants throughout the world.

Professor DeSimone has received numerous honors and awards,
including a NSF Young Investigator Award, being named a
Presidential Faculty Fellow, the Presidential Green
Chemistry Award, and the ACS Carl S. Marvel Creative
Polymer Chemistry Award.


PRACTICAL DETAILS for Feb. 27 meeting:

Cost: $30 regular
$15 for unemployed/retired/students
Free for just the talk at 8 PM
(but please let us know for headcount)

Social Hour: 6:00 PM
Dinner: 7:00 PM
Talk: 8:00 PM

Dinner Choices (pick one):
pork tenderloin
breast of chicken piccata
grilled vegetable with wild rice

Location: Michael's at Shoreline, Mountain View


- Make reservations by 5 PM Friday Feb. 23.

- Please provide contact information (email or phone),
name & affiliation, and your DINNER CHOICE.

- You should receive confirmation of your registration;
if not, please try again.

- Register through the web site (preferred),

or contact:
Brian Pennington

- We must ask you to be liable for the cost of
your dinner if you register and do not attend;
cancellations may be made up to the registration


From 101 in Mountain View, take the Shoreline Boulevard
Exit, turning toward the bay. Drive past the Shoreline
Amphitheater and go straight ahead, entering into
Shoreline Park. After a mile or so inside the park,
a sign for Michael's will direct you to turn left into
the parking lot for Michael's.
Address: 2960 N Shoreline Blvd.
Restaurant phone: 650-962-1014
(do not call restaurant for reservations)



GGPF 2001 Spring Symposium:

Monday, March 19, 2001
Michael's at Shoreline, 8:30 - 6:00 PM

Lunch included.

Keynote Speakers:

Harvey Blair, Bell Laboratories/Lucent Technologies,
"Solving Plastics Problems by Thermal Analysis"

Bruno von Mele, Free University of Brussels,
"Transformation Kinetics and Properties of
Thermosetting and Multi-Phase (Reacting) Polymer
Systems Characterized by Modulated Temperature DSC
and Micro Thermal Analysis"

Vendor Presentations:

Mettler-Toledo: Jonathon Foreman, "Photo-Thermal
Analysis of Polymer Curing"

Perkin-Elmer: William Sichina, "Enhanced
Characterization of Materials Using StepScan DSC"

TA Instruments: Len Thomas, "Use of Multiple
Heating Rate DSC and Modulated DSC to Detect and
Analyze Temperature/Time Dependent Transitions in

Thermo Haake: Vijay Reddy, "Innovative Solutions
for Thermal Analysis, Rheology, Lab Scale Processing
and Surface Science from Thermo Haake"

Vendor Display Tables:
From 8:30 A.M., during breaks

This should be an exceptional event and the special
vendor format provides a unique opportunity
here in the Bay Area for all of you who cannot easily
attend NATAS or PittCon events on the East Coast.
Coming right after the PittCon meeting, it also
allows all the vendors to present or discuss their
latest releases or announcements.

Practical Information:

COST: $95.00


Mail a check made out to "GGPF" to:
Martha Steiner
147 Carlisle Way
Sunnyvale, CA 94087
Please include names, affiliations, and contact
information for all registrants.

Attendance will be filled on a first come, first
serve basis until the room capacity is reached.
We regret that we cannot accomondate non-paying
attendees at this event.

For questions, contact:

Martha Steiner


Bruce Prime


Local Academic Events in the near Future:

The Fourth Flory Conference in Macromolecular &
Physical Chemistry
Stanford, Feb. 2-3, 2001

This annual event usually has an outstanding set
speakers, and this year's event is no different.
See the web page for a complete list of speakers.

Register through the web page, or contact
Ms. Lindi Press
(650) 723-0153

Special Polymer Short Course
Stanford University, Feb. 4-6, 2001
"Polymer Science: Synthesis to Processing

Taught by Stanford Professors Curt Frank,
Gerry Fuller, and Bob Waymouth.

More information is available on the web page, or
Julia Harms

Already started, but lasts a semester:
Jan. 27- May 26: San Jose State University
MatE 234, Sat mornings 9:00 - noon
"Microelectronic Packaging Materials Science",
Prof. Guna Selvaduray

Course Description (abridged): To educate
packaging engineers on the importance of materials
science principles, and how these play a key role
in the design, manufacture, performance, and
quality assurance of microelectronic packages.
The classes of materials - polymers, ceramics,
and metals - and their structure-processing-
properties relationships and relevance in packaging
will be studied. ... phase diagrams, diffusion
and mass transfer, bonding and soldering, corrosion,
materials testing methods, materials characterization
techniques, and failure analysis techniques.
Fabrication methods such as modeling, stamping,
deburring... Students are encouraged to bring with
them topics of interest for class discussion and

Room: Engr 301, SJSU

Enrollment: May be taken through SJSU Open
University for approximately $500 plus textbook and
instructional materials. For early enrollment,
contact 408-924-2670. Enrollment during the first
class will also be facilitated.

For further information, contact Prof. Selvaduray


Many Spring evening courses are now available from
UC Berkeley Extension

UC Santa Cruz Extension is still listing its
Winter courses at

Ed. Note: as always, there are some outstanding
polymer-related seminars at U. C. Berkeley and at Stanford:

Examples at U. C. Berkeley:

February 20, 4:00 PM, Berkeley
Prof. Jacob Israelachvili, UC, Santa Barbara
"Differences in the Interactions of Biological and
Non-Biological Surfaces"

March 13, 4:00 PM, Berkeley
Prof. Richard E. Smalley, Rice University
"Buckytubes! New Materials and New Devices from Carbon"

May 7 at 4 PM, Berkeley
Berkeley Lectures in Chemical Engineering
Prof. William B. Russel, Princeton
"Micellar Solutions of Associative Polymers:
from Chemical Technology to Polymer Physics"

May 9, 4PM Berkeley
Berkeley Lectures in Chemical Engineering
Prof. William B. Russel, Princeton
"Hard Sphere Colloids: The Simplest Complex Fluid"

See these and many other topics on line at

Examples from Stanford:

May 8 & 10, Stanford
Stauffer Lectures (by Prof. Frechet of UC Berkeley!)
4 PM each day

May 15 & 17, Stanford
Mason lectures (Prof. Robert Langer of MIT).
May 15 - "General Biomaterials and How They Will
Change Our Lives"
May 17 - "Novel Drug Delivery Systems"

See also the general Stanford Chemistry dept schedule

Chemical Engineering seminars can be found at


Other events of possible interest to the
GGPF audience:

Feb. 5-8, Santa Clara
AVS Second International Conference on Microelectronics
and Interfaces
Feb. 5-9 short courses associated with the AVS mtg.
Ed. Note: classes on surface science, SEM, and many
variations on thin film processing technologies.

Feb. 15-20, San Francisco
AAAS annual meeting
Ed. Note: includes a nanotechnology session
Feb. 15-16 with a lot of interesting topics; see

Feb. 15, Sunnyvale
IEEE CPMT short course, noon - 5 PM
"Chip Scale Packaging Technology for Modern

Feb. 16, Reno
SPE luncheon event, details t.b.a.
check the web page

Feb. 20, Redwood City
BAMS dinner meeting
"Automation of MS/MS Protein Identification
Using Peptidic Space and Expectation Values"
Ronald C. Beavis, Proteometrics

Feb. 25 - March 2, Santa Clara
SPIE Microlithography 2001 meeting
Ed. Note: has associated short courses on resist
materials, including one on diazonaphthoquinone
(DNQ)/novolak resist systems and one on deep-UV
resists taught by none other than Grant Wilson.
Also has intros to x-ray lithography, e-beam
lithography, optical lithography, etc.

March 15, location tbd.
March SPE local chapter meeting
details to be announced
check the web page

March 18-19, San Jose
SEMI-THERM Short Course:
Thermal Design for Electronics Cooling Applications
March 20-22, San Jose
IEEE SEMI-THERM - Semiconductor Thermal Measurement
and Management Symposium
Vendors plus evening discussion session on
optoelectronic packaging, etc.

April 16 - 20, SF
Materials Research Society Spring 2001 Meeting
Register by March 30 for early reg. discount.
Note: meeting registration gets you a year's
membership in the MRS, and there are many
polymer-related sessions.

April 19, Pleasanton
SPE GGS all-day Tech Fair

April 20-21, Palo Alto
International Microelectronics and Packaging Society
Advanced Technology Workshop on Thermal Management for
High-Performance Computing & Wireless Applications

April 26, SRI (Menlo Park)
NorCal AIChE one-day Symposium on the Semiconductor Industry
Note: keynote speaker will be Dr. Louis C. Glasgow -
Global Technology Director for DuPont Fluoroproducts
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May 17 - 18, Sunnyvale
BioMEMS 2001 Nanofabrication and Analytical Techniques for
Biomedical Microsystem Applications

May 24
Silicon Valley ACS dinner meeting
Ralph Merkle will speak on nanotechnology
details t.b.a.


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